Determination of interfacial roughness and its correlation in sputtered CoZr/Cu multilayers

Author: Langer J.   Mattheis R.   Krauszlich J.   Senz S.   Hesse D.   Schuhrke T.   Zweck J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 187-190

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Abstract