Experimental and numerical analysis of rapid reaction to initiate the radical chain reactions in WSix CVD

Author： Chae Y.K.   Egashira Y.   Shimogaki Y.   Sugawara K.   Komiyama H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 151-158

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