Preparation of c-BN films by RF sputtering and the relation of BN phase formation to the substrate bias and temperature

Author： Wang B. Zhao Y.N. Yu S. He Z. Li D.M. Tao Y.C. Zou G.T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.2, 1998-05, pp. : 220-222

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