Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge

Author: Gazicki M.   Ledzion R.   Mazurczyk R.   Pawlowski S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 123-131

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