Influence of gas phase chemistry on the properties of hydrogenated amorphous silicon and silicon-carbon alloys grown by HACVD

Author: Dieguez Campo J.M.   Lenski M.   Comes F.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 115-125

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Abstract