Ir and Ru bottom electrodes for (Ba, Sr)TiO 3 thin films deposited by liquid delivery source chemical vapor deposition

Author： Lee W.-J. Basceri C. Streiffer S.K. Kingon A.I. Doo-Young Yang Park Y. Kim H.-G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 285-290

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