Ir and Ru bottom electrodes for (Ba, Sr)TiO 3 thin films deposited by liquid delivery source chemical vapor deposition

Author: Lee W.-J.   Basceri C.   Streiffer S.K.   Kingon A.I.   Doo-Young Yang   Park Y.   Kim H.-G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 285-290

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Abstract