Fabrication and characterization of epitaxial AlN/TiN bilayers on sapphire

Author： Talyansky V.   Vispute R.D.   Ramesh R.   Sharma R.P.   Venkatesan T.   Li Y.X.   Salamanca-Riba L.G.   Wood M.C.   Lareau R.T.   Jones K.A.   Iliadis A.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 37-41

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