Mechanical properties of W and W(C) thin films: Young's modulus, fracture toughness and adhesion

Author： Harry E.   Rouzaud A.   Ignat M.   Juliet P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 195-201

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