Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode

Author: Goschnick J.   Natzeck C.   Sommer M.   Zudock F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 215-219

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Abstract