Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings

Author: Burden A.P.   Anguita J.V.   Silva S.R.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 252-256

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Abstract