Simulation of Berkovich nanoindentation experiments on thin films using finite element method1,2,3

Author： Lichinchi M.   Lenardi C.   Haupt J.   Vitali R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 278-286

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