Polycrystalline silicon thin films grown by dc arc discharge ion plating

Author: Yoshida M.   Saida T.   Okada S.   Akamatsu M.   Kondo K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 127-129

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Abstract