Author: Shin C.B. Hur J.S. Oh S.G.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 18-21
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Ion and neutral temperatures in an electron cyclotron resonance plasma
By Yonesu A. Shinohara S. Yamashiro Y. Kawai Y.
Thin Solid Films, Vol. 390, Iss. 1, 2001-06 ,pp. :
Ion temperature and fluctuation in a large-diameter electron-cyclotron-resonance plasma
By Koga M. Yoshizawa T. Ueda Y. Yonesu A. Kawai Y.
Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. :