Large area deposition of thick diamond film by direct-current PACVD

Author: Baik Y.J.   Lee J.K.   Lee W.S.   Eun K.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 202-206

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Abstract