Low resistivity indium tin oxide films deposited by unbalanced DC magnetron sputtering

Author: Shin S.H.   Shin J.H.   Park K.J.   Ishida T.   Tabata O.   Kim H.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 225-229

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Abstract