Author： Shirai H. Sakuma Y. Ueyama H.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 7-11
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
By Ohkawara G. Nakajima M. Ueyama H. Shirai H.
Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. :
The control of the high-density microwave plasma for large-area electronics
By Shirai H. Sakuma Y. Ueyama H.
Thin Solid Films, Vol. 337, Iss. 1, 1999-01 ,pp. :
High rate growth of microcrystalline silicon by VHF-GD at high pressure
By Graf U. Meier J. Kroll U. Bailat J. Droz C. Vallat-Sauvain E. Shah A.
Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. :