Diamond-like carbon films with extremely low stress

Author: Bhattacharyya R.   Kumar S.   Sarangi D.   Dixit P.N.   Panwar O.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.346, Iss.1, 1999-06, pp. : 130-137

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Abstract