The stacking faults and their strain effect at the Si/SiO 2 interfaces of a directly bonded SOI (silicon on insulator)

Author： Choi D.-J.   Shin D.-W.   Kim G.-H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.346, Iss.1, 1999-06, pp. : 169-173

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