Effect of thermal stresses on temperature dependence of refractive index for Ta 2 O 5 dielectric films

Author: Cheng W.H.   Chi S.F.   Chu A.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.347, Iss.1, 1999-06, pp. : 233-237

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Abstract