Copper nitride thin films prepared by reactive radio-frequency magnetron sputtering

Author： Nosaka T.   Yoshitake M.   Okamoto A.   Ogawa S.   Nakayama Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.348, Iss.1, 1999-07, pp. : 8-13

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