Author: Ma L.P. Gu Y.S. Duan Z.J. Yuan L. Pang S.J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 10-13
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Carbon nitride films incorporated with metal by rf plasma enhanced chemical vapor deposition
Thin Solid Films, Vol. 312, Iss. 1, 1998-01 ,pp. :