Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

Author: Alvisi M.   Scaglione S.   Martelli S.   Rizzo A.   Vasanelli L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 19-23

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Abstract