Real time spectroscopic ellipsometry monitoring of the SiC growth during the interaction process of elemental carbon with Si surfaces

Author： Wohner T.   Cimalla V.   Stauden T.   Schaefer J.A.   Pezoldt J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 28-32

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