Composition control of r.f.-sputtered Ti 50 Ni 40 Cu 10 thin films using optical emission spectroscopy

Author: Wu S.K.   Chen Y.S.   Chen J.Z.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.1, 2000-04, pp. : 61-66

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Abstract