Submicron metal oxide structures by a sol-gel process on patterned substrates

Author: Bechinger C.   Muffler H.   Schafle C.   Sundberg O.   Leiderer P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.366, Iss.1, 2000-05, pp. : 135-138

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Abstract