Study of diamond film growth mechanism on porous silicon during hot-filament chemical vapor deposition

Author: Liao Y.   Ye F.   Shao Q.Y.   Chang C.   Wang G.Z.   Fang R.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 211-215

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Abstract