Structural properties and nitrogen-loss characteristics in sputtered tungsten nitride films

Author: Shen Y.G.   Mai Y.W.   McBride W.E.   Zhang Q.C.   McKenzie D.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.372, Iss.1, 2000-09, pp. : 257-264

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Abstract