Investigation of the nucleation and growth of SiC nanostructures on Si

Author: Scharmann F.   Maslarski P.   Attenberger W.   Lindner J.K.N.   Stritzker B.   Stauden T.   Pezoldt J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 92-96

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Abstract