Laser processing of amorphous silicon for large-area polysilicon imagers

Author: Boyce J.B.   Fulks R.T.   Ho J.   Lau R.   Lu J.P.   Mei P.   Street R.A.   Van Schuylenbergh K.F.   Wang Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 137-142

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Abstract