Characteristics of VHF excited hydrogen plasmas using a ladder-shaped electrode

Author： Takeuchi Y.   Kawasaki I.   Mashima H.   Murata M.   Kawai Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 217-221

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