Thermal stability of amorphous thin films: Ti 3 Si 1 O 8 vs. TiO 2 and mictamict compounds

Author: Giauque P.H.   Cherry H.B.   Nicolet M.-A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 135-140

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Abstract