Structure and transport properties of p-type polycrystalline silicon fabricated from fluorinated source gas

Author: Kamiya T.   Nakahata K.   Ro K.   Shimizu I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 229-235

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract