Hot-wire CVD growth simulation for thickness uniformity

Author: Sali J.V.   Patil S.B.   Jadkar S.R.   Takwale M.G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 66-70

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Abstract