Hydrogenation of laser-crystallized poly-silicon thin films and characterization of defects using a catalytic method

Author: Kitahara K.   Nogi H.   Moritani A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 92-96

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Abstract