Modification of the structure of ZnO:Al films by control of the plasma parameters

Author: Tzolov M.   Tzenov N.   Dimova-Malinovska D.   Kalitzova M.   Pizzuto C.   Vitali G.   Zollo G.   Ivanov I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.396, Iss.1, 2001-09, pp. : 276-281

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Abstract