Effect of nitrogen ion implantation on the microstructural transformation of boron film

Author: Tian J.   Xia L.   Zhang H.   Lee S.   Lu F.   Tang W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.401, Iss.1, 2001-12, pp. : 106-110

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Abstract