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Elsevier

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Stoichiometry of tantalum oxide films prepared by KrF excimer laser-induced chemical vapor deposition

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KrF pulsed laser deposition of chromium oxide thin films from Cr₈O₂₁ targets

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KrF laser CVD of titanium oxide from titanium tetraisopropoxide

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Carbon nitride thin films prepared by nitrogen ion assisted pulsed laser deposition of graphite using KrF excimer laser

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