TEM analysis of an additional metal-rich component at the C49-C54 transformation in Ti/Si thin films capped with TiN

Author： Matko I.   Chenevier B.   Chaix-Pluchery O.   Madar R.   La Via F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 123-127

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