Stress relaxation and phase stability of cubic boron nitride films during ion post implantation and annealing

Author: Fitz C.   Fukarek W.   Moller W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 155-159

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Abstract