Young's modulus of (Ti,Si)N films by surface acoustic waves and indentation techniques

Author: Vaz F.   Carvalho S.   Rebouta L.   Silva M.Z.   Paul A.   Schneider D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 160-168

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Abstract