NH 3 effect on the growth of carbon nanotubes on glass substrate in plasma enhanced chemical vapor deposition

Author: Han J.-H.   Lee C.H.   Jung D.-Y.   Yang C.-W.   Yoo J.-B.   Park C.-Y.   Kim H.J.   Yu S.   Yi W.   Park G.S.   Han I.T.   Lee N.S.   Kim J.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 120-125

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract