Molecular beam epitaxy synthesis of Si 1-y C y and Si 1-x-y Ge x C y alloys and Ge islands using an electron cyclotron resonance argon/methane plasma

Author： Baribeau J.-M. Lockwood D.J. Balle J. Rolfe S.J. Sproule G.I. Moisa S.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.410, Iss.1, 2002-05, pp. : 61-71

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