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Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties

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Structural and electrical properties of Cu films deposited on glass by DC magnetron sputtering

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Optical properties of mixed phase a-C/diamond films deposited by dc magnetron sputtering of vitreous carbon target

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Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering

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