The effect of ion beam bombardment on the properties of Ta(C)N films deposited from pentakis-diethylamido-tantalum

Author: Kim S.-H.   Im S.-J.   Kim K.-B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 177-186

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Abstract