Effects of annealing on the properties of Cu/low k polymer/Si structures prepared by plasma polymerization of decahydronaphthalene and tetraethylorthosilicate and Cu sputtering

Author： Shim C.   Yang J.   Jung S.   Jung D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 83-87

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