Influence of post-deposition annealing on the properties of transparent conductive nanocrystalline ZAO thin films prepared by RF magnetron sputtering with highly conductive ceramic target

Author： Fang G.J.   Li D.   Yao B.-L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.418, Iss.2, 2002-10, pp. : 156-162

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