Rutile-type TiO 2 thin film for high-k gate insulator

Author: Kadoshima M.   Hiratani M.   Shimamoto Y.   Torii K.   Miki H.   Kimura S.   Nabatame T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.424, Iss.2, 2003-01, pp. : 224-228

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Abstract