VHF plasma processing for in-line deposition systems

Author: Rudiger J.   Brechtel H.   Kottwitz A.   Kuske J.   Stephan U.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 16-20

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Abstract