Correlation between structure, stress and optical properties in direct current sputtered molybdenum oxide films

Author： Mohamed S.H. Kappertz O. Ngaruiya J.M. Leervad Pedersen T.P. Drese R. Wuttig M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 135-143

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