Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics

Author： Cao D.M.   Meng W.J.   Simko S.J.   Doll G.L.   Wang T.   Kelly K.W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 46-54

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